| 產(chǎn)品參數(shù) | | | 品牌 | AERA | | 是否進口 | 是 | | 原產(chǎn)國\/地區(qū) | 日本 | | 加工定制 | 否 | | 測量范圍 | 0-30 | | 精度等級 | 1 | | 公稱通徑 | 1\/4 | | 適用介質(zhì) | GAS | | 工作壓力 | 10 | | 工作溫度 | 23 | | 規(guī)格 | B-1 | | 主要下游平臺 | 其他 | | 主要銷售地區(qū) | 東南亞 | | 有可授權(quán)的自有品牌 | 否 | | 可售賣地 | 全國 | | 類型 | 質(zhì)量流量計 | | 型號 | FC-R7700CD | | AERA原裝進口FC-R7700CD氣體質(zhì)量流量計
AERA原裝進口FC-R7700CD氣體質(zhì)量流量計
For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 series is both cost-effective and precise.
Easy Integration
Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with no installation hassles. Certain models feature standard electrical connectors and critical dimensions to easily fit existing systems.
 Fast Response
Advances in the FC-R7700 series’ technical design delivery enhanced performance compared to competing mass flow controllers (MFCs). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FCR7700 series provides a fast response time. These speed enhancements minimize over-shoot and undershoot, and produce an actual-flow settling time of
Unsurpassed Reliability
With over 40,000 units delivered in FC-770AC FC-770C series MFCs,
AERA FC-R7700CD 氣體質(zhì)量流量計
Operational FC-R7700CD
Full-Scale Range 10 sccm to 5 slm
N/O: 6 to 20 slm* N/C ： 6 to 50 slm 35 to 200 slm Response TimeDifferential Pressure 7 to 40 psiD
10 to 40 psiD 14 to 40 psiD
21 to 40 psiD3
Normal Operating Pressure 70 psig
Maximum Inlet Pressure 140 psig?
Temperature Range 5 to 45°C (41 to 113°F)
* N/O: Normally Open Valve Model,? N/C: Normally Closed Valve Model 1:? Less than ±1 for Full Scale Flow greater than 30SLM 2:? 5～100 for Full Scale Flow greater than 150SLM 3:? 28～43 psiD for Full Scale Flow greater than 150SLM
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